Design of Experiments for the Study of High-Power Pulsed Magnetron Sputtering.

Shapovalov VI, Sharkovskii DS, Nikolaev AV

DOI: 10.3390/ma19163515
Published: 2026 Aug 19
Container: Materials (Basel, Switzerland)
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/ma19163515,
  title = {Design of Experiments for the Study of High-Power Pulsed Magnetron Sputtering.},
  author = {Shapovalov VI and Sharkovskii DS and Nikolaev AV},
  year = {2026},
  journal = {Materials (Basel, Switzerland)},
  doi = {10.3390/ma19163515},
  url = {https://doi.org/10.3390/ma19163515}
}

RIS

TY  - JOUR
TI  - Design of Experiments for the Study of High-Power Pulsed Magnetron Sputtering.
AU  - Shapovalov VI
AU  - Sharkovskii DS
AU  - Nikolaev AV
PY  - 2026
JO  - Materials (Basel, Switzerland)
DO  - 10.3390/ma19163515
UR  - https://doi.org/10.3390/ma19163515
ER  -

APA

VI, S., DS, S., & AV, N. (2026). Design of Experiments for the Study of High-Power Pulsed Magnetron Sputtering.. Materials (Basel, Switzerland). https://doi.org/10.3390/ma19163515

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pubmed · retrieved 2026-09-25T00:59:14.417Z