PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures

Thomas Lisec, Ole Behrmann, Björn Gojdka

Open source

DOI: 10.3390/mi13030398
Published: 2022-02-28
Container: Micromachines
Publisher: MDPI AG
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.3390/mi13030398,
  title = {PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures},
  author = {Thomas Lisec and Ole Behrmann and Björn Gojdka},
  year = {2022},
  journal = {Micromachines},
  doi = {10.3390/mi13030398},
  url = {https://doi.org/10.3390/mi13030398}
}

RIS

TY  - JOUR
TI  - PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures
AU  - Thomas Lisec
AU  - Ole Behrmann
AU  - Björn Gojdka
PY  - 2022
JO  - Micromachines
DO  - 10.3390/mi13030398
UR  - https://doi.org/10.3390/mi13030398
ER  -

APA

Lisec, T., Behrmann, O., & Gojdka, B. (2022). PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures. Micromachines. https://doi.org/10.3390/mi13030398

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crossref · retrieved 2026-09-25T04:52:58.634Z