Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process.
- DOI
- 10.3390/mi13060899
- Published
- 2022 Jun 6
- Container
- Micromachines
- Publisher
- Not recorded
- Open access
- yes
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Cite this work
BibTeX
@article{allodium:10.3390/mi13060899,
title = {Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process.},
author = {Sun Q and Tang J and Shen L and Lan J and Shen Z and Xiao J and Chen X and Zhang J and Wu Y and Xu J and Wang X},
year = {2022},
journal = {Micromachines},
doi = {10.3390/mi13060899},
url = {https://doi.org/10.3390/mi13060899}
}RIS
TY - JOUR TI - Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process. AU - Sun Q AU - Tang J AU - Shen L AU - Lan J AU - Shen Z AU - Xiao J AU - Chen X AU - Zhang J AU - Wu Y AU - Xu J AU - Wang X PY - 2022 JO - Micromachines DO - 10.3390/mi13060899 UR - https://doi.org/10.3390/mi13060899 ER -
APA
Q, S., J, T., L, S., J, L., Z, S., J, X., X, C., J, Z., Y, W., J, X., & X, W. (2022). Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process.. Micromachines. https://doi.org/10.3390/mi13060899
Source records
- pubmed · retrieved 2026-09-26T00:49:46.558Z