Process Optimization and Performance Evaluation of TSV Arrays for High Voltage Application.

Feng L, Zeng S, Su Y, Wang L, Xu Y, Guo S, Chen S, Ji Y, Peng X, Wu Z, Wang S

DOI: 10.3390/mi14010102
Published: 2022 Dec 30
Container: Micromachines
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi14010102,
  title = {Process Optimization and Performance Evaluation of TSV Arrays for High Voltage Application.},
  author = {Feng L and Zeng S and Su Y and Wang L and Xu Y and Guo S and Chen S and Ji Y and Peng X and Wu Z and Wang S},
  year = {2022},
  journal = {Micromachines},
  doi = {10.3390/mi14010102},
  url = {https://doi.org/10.3390/mi14010102}
}

RIS

TY  - JOUR
TI  - Process Optimization and Performance Evaluation of TSV Arrays for High Voltage Application.
AU  - Feng L
AU  - Zeng S
AU  - Su Y
AU  - Wang L
AU  - Xu Y
AU  - Guo S
AU  - Chen S
AU  - Ji Y
AU  - Peng X
AU  - Wu Z
AU  - Wang S
PY  - 2022
JO  - Micromachines
DO  - 10.3390/mi14010102
UR  - https://doi.org/10.3390/mi14010102
ER  -

APA

L, F., S, Z., Y, S., L, W., Y, X., S, G., S, C., Y, J., X, P., Z, W., & S, W. (2022). Process Optimization and Performance Evaluation of TSV Arrays for High Voltage Application.. Micromachines. https://doi.org/10.3390/mi14010102

Source records

pubmed · retrieved 2026-11-10T10:49:02.887Z