Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators

Almur A. S. Rabih, Mohammad Kazemi, Michaël Ménard, Frederic Nabki

Open source

DOI: 10.3390/mi14030700
Published: 03
Container: Micromachines
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi14030700,
  title = {Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators},
  author = {Almur A. S. Rabih and Mohammad Kazemi and Michaël Ménard and Frederic Nabki},
  year = {2023},
  journal = {Micromachines},
  doi = {10.3390/mi14030700},
  url = {https://doi.org/10.3390/mi14030700}
}

RIS

TY  - JOUR
TI  - Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators
AU  - Almur A. S. Rabih
AU  - Mohammad Kazemi
AU  - Michaël Ménard
AU  - Frederic Nabki
PY  - 2023
JO  - Micromachines
DO  - 10.3390/mi14030700
UR  - https://doi.org/10.3390/mi14030700
ER  -

APA

Rabih, A. A. S., Kazemi, M., Ménard, M., & Nabki, F. (2023). Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators. Micromachines. https://doi.org/10.3390/mi14030700

Source records

doaj · retrieved 2026-09-26T13:43:23.035Z