Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection.

Cui M, Chuai S, Huang Y, Liu Y, Li J

DOI: 10.3390/mi14081565
Published: 2023 Aug 6
Container: Micromachines
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi14081565,
  title = {Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection.},
  author = {Cui M and Chuai S and Huang Y and Liu Y and Li J},
  year = {2023},
  journal = {Micromachines},
  doi = {10.3390/mi14081565},
  url = {https://doi.org/10.3390/mi14081565}
}

RIS

TY  - JOUR
TI  - Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection.
AU  - Cui M
AU  - Chuai S
AU  - Huang Y
AU  - Liu Y
AU  - Li J
PY  - 2023
JO  - Micromachines
DO  - 10.3390/mi14081565
UR  - https://doi.org/10.3390/mi14081565
ER  -

APA

M, C., S, C., Y, H., Y, L., & J, L. (2023). Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection.. Micromachines. https://doi.org/10.3390/mi14081565

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pubmed · retrieved 2026-09-26T13:18:07.499Z