The High-Efficiency Design Method for Capacitive MEMS Accelerometer.

Liu W, Zhao T, He Z, Ye J, Gong S, Wang X, Yang Y

DOI: 10.3390/mi14101891
Published: 2023 Sep 30
Container: Micromachines
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi14101891,
  title = {The High-Efficiency Design Method for Capacitive MEMS Accelerometer.},
  author = {Liu W and Zhao T and He Z and Ye J and Gong S and Wang X and Yang Y},
  year = {2023},
  journal = {Micromachines},
  doi = {10.3390/mi14101891},
  url = {https://doi.org/10.3390/mi14101891}
}

RIS

TY  - JOUR
TI  - The High-Efficiency Design Method for Capacitive MEMS Accelerometer.
AU  - Liu W
AU  - Zhao T
AU  - He Z
AU  - Ye J
AU  - Gong S
AU  - Wang X
AU  - Yang Y
PY  - 2023
JO  - Micromachines
DO  - 10.3390/mi14101891
UR  - https://doi.org/10.3390/mi14101891
ER  -

APA

W, L., T, Z., Z, H., J, Y., S, G., X, W., & Y, Y. (2023). The High-Efficiency Design Method for Capacitive MEMS Accelerometer.. Micromachines. https://doi.org/10.3390/mi14101891

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pubmed · retrieved 2026-09-26T13:42:36.213Z