Patterning Techniques in Coplanar Micro/Nano Capacitive Sensors.

Joo S, Han JY, Seo S, Kim JH

Open source

DOI: 10.3390/mi14112034
Published: 2023 Oct 31
Container: Micromachines
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi14112034,
  title = {Patterning Techniques in Coplanar Micro/Nano Capacitive Sensors.},
  author = {Joo S and Han JY and Seo S and Kim JH},
  year = {2023},
  journal = {Micromachines},
  doi = {10.3390/mi14112034},
  url = {https://doi.org/10.3390/mi14112034}
}

RIS

TY  - JOUR
TI  - Patterning Techniques in Coplanar Micro/Nano Capacitive Sensors.
AU  - Joo S
AU  - Han JY
AU  - Seo S
AU  - Kim JH
PY  - 2023
JO  - Micromachines
DO  - 10.3390/mi14112034
UR  - https://doi.org/10.3390/mi14112034
ER  -

APA

S, J., JY, H., S, S., & JH, K. (2023). Patterning Techniques in Coplanar Micro/Nano Capacitive Sensors.. Micromachines. https://doi.org/10.3390/mi14112034

Source records

pubmed · retrieved 2026-09-25T14:33:00.880Z
europe-pmc · retrieved 2026-09-25T14:33:00.881Z
doaj · retrieved 2026-09-25T14:33:00.883Z