Driving Principle and Stability Analysis of Vertical Comb-Drive Actuator for Scanning Micromirrors.

Shan Y, Qian L, Wang J, Wang K, Zhou P, Li W, Shen W

DOI: 10.3390/mi15020226
Published: 2024 Jan 31
Container: Micromachines
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi15020226,
  title = {Driving Principle and Stability Analysis of Vertical Comb-Drive Actuator for Scanning Micromirrors.},
  author = {Shan Y and Qian L and Wang J and Wang K and Zhou P and Li W and Shen W},
  year = {2024},
  journal = {Micromachines},
  doi = {10.3390/mi15020226},
  url = {https://doi.org/10.3390/mi15020226}
}

RIS

TY  - JOUR
TI  - Driving Principle and Stability Analysis of Vertical Comb-Drive Actuator for Scanning Micromirrors.
AU  - Shan Y
AU  - Qian L
AU  - Wang J
AU  - Wang K
AU  - Zhou P
AU  - Li W
AU  - Shen W
PY  - 2024
JO  - Micromachines
DO  - 10.3390/mi15020226
UR  - https://doi.org/10.3390/mi15020226
ER  -

APA

Y, S., L, Q., J, W., K, W., P, Z., W, L., & W, S. (2024). Driving Principle and Stability Analysis of Vertical Comb-Drive Actuator for Scanning Micromirrors.. Micromachines. https://doi.org/10.3390/mi15020226

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pubmed · retrieved 2026-09-26T14:46:51.263Z