A MEMS Electrochemical Angular Accelerometer with Silicon-Based Four-Electrode Structure
- DOI
- 10.3390/mi15030351
- Published
- 2024-02-29
- Container
- Micromachines
- Publisher
- MDPI AG
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.3390/mi15030351,
title = {A MEMS Electrochemical Angular Accelerometer with Silicon-Based Four-Electrode Structure},
author = {Mingbo Zhang and Qinghua Liu and Maoqi Zhu and Jian Chen and Deyong Chen and Junbo Wang and Yulan Lu},
year = {2024},
journal = {Micromachines},
doi = {10.3390/mi15030351},
url = {https://doi.org/10.3390/mi15030351}
}RIS
TY - JOUR TI - A MEMS Electrochemical Angular Accelerometer with Silicon-Based Four-Electrode Structure AU - Mingbo Zhang AU - Qinghua Liu AU - Maoqi Zhu AU - Jian Chen AU - Deyong Chen AU - Junbo Wang AU - Yulan Lu PY - 2024 JO - Micromachines DO - 10.3390/mi15030351 UR - https://doi.org/10.3390/mi15030351 ER -
APA
Zhang, M., Liu, Q., Zhu, M., Chen, J., Chen, D., Wang, J., & Lu, Y. (2024). A MEMS Electrochemical Angular Accelerometer with Silicon-Based Four-Electrode Structure. Micromachines. https://doi.org/10.3390/mi15030351
Source records
- crossref · retrieved 2026-09-25T13:39:14.907Z