Grayscale Lithography and a Brief Introduction to Other Widely Used Lithographic Methods: A State-of-the-Art Review.

Khonina SN, Kazanskiy NL, Butt MA.

Open source

DOI: 10.3390/mi15111321
Published: 2024-10-30
Container: Micromachines (Basel)
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi15111321,
  title = {Grayscale Lithography and a Brief Introduction to Other Widely Used Lithographic Methods: A State-of-the-Art Review.},
  author = {Khonina SN and  Kazanskiy NL and  Butt MA.},
  year = {2024},
  journal = {Micromachines (Basel)},
  doi = {10.3390/mi15111321},
  url = {https://doi.org/10.3390/mi15111321}
}

RIS

TY  - JOUR
TI  - Grayscale Lithography and a Brief Introduction to Other Widely Used Lithographic Methods: A State-of-the-Art Review.
AU  - Khonina SN
AU  -  Kazanskiy NL
AU  -  Butt MA.
PY  - 2024
JO  - Micromachines (Basel)
DO  - 10.3390/mi15111321
UR  - https://doi.org/10.3390/mi15111321
ER  -

APA

SN, K., NL, K., & MA., B. (2024). Grayscale Lithography and a Brief Introduction to Other Widely Used Lithographic Methods: A State-of-the-Art Review.. Micromachines (Basel). https://doi.org/10.3390/mi15111321

Source records

europe-pmc · retrieved 2026-09-24T23:50:40.772Z
doaj · retrieved 2026-09-24T23:50:40.775Z