A MEMS Pirani Vacuum Gauge Based on Porous Silicon

Yuzhe Lin, Zichao Zhang, Jifang Tao, Lianggong Wen

Open source

DOI: 10.3390/mi16030296
Published: 2025-02-28
Container: Micromachines
Publisher: MDPI AG
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.3390/mi16030296,
  title = {A MEMS Pirani Vacuum Gauge Based on Porous Silicon},
  author = {Yuzhe Lin and Zichao Zhang and Jifang Tao and Lianggong Wen},
  year = {2025},
  journal = {Micromachines},
  doi = {10.3390/mi16030296},
  url = {https://doi.org/10.3390/mi16030296}
}

RIS

TY  - JOUR
TI  - A MEMS Pirani Vacuum Gauge Based on Porous Silicon
AU  - Yuzhe Lin
AU  - Zichao Zhang
AU  - Jifang Tao
AU  - Lianggong Wen
PY  - 2025
JO  - Micromachines
DO  - 10.3390/mi16030296
UR  - https://doi.org/10.3390/mi16030296
ER  -

APA

Lin, Y., Zhang, Z., Tao, J., & Wen, L. (2025). A MEMS Pirani Vacuum Gauge Based on Porous Silicon. Micromachines. https://doi.org/10.3390/mi16030296

Source records

crossref · retrieved 2026-09-26T10:28:45.721Z