Molecular Dynamics Study on the Effect of Surface Films on the Nanometric Grinding Mechanism of Single-Crystal Silicon

Meng Li, Di Chang, Pengyue Zhao, Jiubin Tan

Open source

DOI: 10.3390/mi16101141
Published: 2025-10-02
Container: Micromachines
Publisher: MDPI AG
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.3390/mi16101141,
  title = {Molecular Dynamics Study on the Effect of Surface Films on the Nanometric Grinding Mechanism of Single-Crystal Silicon},
  author = {Meng Li and Di Chang and Pengyue Zhao and Jiubin Tan},
  year = {2025},
  journal = {Micromachines},
  doi = {10.3390/mi16101141},
  url = {https://doi.org/10.3390/mi16101141}
}

RIS

TY  - JOUR
TI  - Molecular Dynamics Study on the Effect of Surface Films on the Nanometric Grinding Mechanism of Single-Crystal Silicon
AU  - Meng Li
AU  - Di Chang
AU  - Pengyue Zhao
AU  - Jiubin Tan
PY  - 2025
JO  - Micromachines
DO  - 10.3390/mi16101141
UR  - https://doi.org/10.3390/mi16101141
ER  -

APA

Li, M., Chang, D., Zhao, P., & Tan, J. (2025). Molecular Dynamics Study on the Effect of Surface Films on the Nanometric Grinding Mechanism of Single-Crystal Silicon. Micromachines. https://doi.org/10.3390/mi16101141

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crossref · retrieved 2026-11-10T07:21:10.559Z