Fabrication Process Development for Optical Channel Waveguides in Sputtered Aluminum Nitride

Soheila Mardani, Bjorn Jongebloed, Ward A. P. M. Hendriks, Meindert Dijkstra, Sonia M. Garcia-Blanco

Open source

DOI: 10.3390/mi16111259
Published: 2025-11-06
Container: Micromachines
Publisher: MDPI AG
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.3390/mi16111259,
  title = {Fabrication Process Development for Optical Channel Waveguides in Sputtered Aluminum Nitride},
  author = {Soheila Mardani and Bjorn Jongebloed and Ward A. P. M. Hendriks and Meindert Dijkstra and Sonia M. Garcia-Blanco},
  year = {2025},
  journal = {Micromachines},
  doi = {10.3390/mi16111259},
  url = {https://doi.org/10.3390/mi16111259}
}

RIS

TY  - JOUR
TI  - Fabrication Process Development for Optical Channel Waveguides in Sputtered Aluminum Nitride
AU  - Soheila Mardani
AU  - Bjorn Jongebloed
AU  - Ward A. P. M. Hendriks
AU  - Meindert Dijkstra
AU  - Sonia M. Garcia-Blanco
PY  - 2025
JO  - Micromachines
DO  - 10.3390/mi16111259
UR  - https://doi.org/10.3390/mi16111259
ER  -

APA

Mardani, S., Jongebloed, B., Hendriks, W. A. P. M., Dijkstra, M., & Garcia-Blanco, S. M. (2025). Fabrication Process Development for Optical Channel Waveguides in Sputtered Aluminum Nitride. Micromachines. https://doi.org/10.3390/mi16111259

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crossref · retrieved 2026-11-10T20:16:39.854Z