Noise-Robust Wafer Map Defect Classification via CNN-ESN Hybrid Architecture.
- DOI
- 10.3390/mi17030309
- Published
- 2026 Feb 28
- Container
- Micromachines
- Publisher
- Not recorded
- Open access
- yes
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limited evidence Score 45/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
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Cite this work
BibTeX
@article{allodium:10.3390/mi17030309,
title = {Noise-Robust Wafer Map Defect Classification via CNN-ESN Hybrid Architecture.},
author = {Choi H and Im D and Oh S and Lee J},
year = {2026},
journal = {Micromachines},
doi = {10.3390/mi17030309},
url = {https://doi.org/10.3390/mi17030309}
}RIS
TY - JOUR TI - Noise-Robust Wafer Map Defect Classification via CNN-ESN Hybrid Architecture. AU - Choi H AU - Im D AU - Oh S AU - Lee J PY - 2026 JO - Micromachines DO - 10.3390/mi17030309 UR - https://doi.org/10.3390/mi17030309 ER -
APA
H, C., D, I., S, O., & J, L. (2026). Noise-Robust Wafer Map Defect Classification via CNN-ESN Hybrid Architecture.. Micromachines. https://doi.org/10.3390/mi17030309
Source records
- pubmed · retrieved 2026-09-25T05:15:24.474Z