Fusion of Physical Mechanism and Data-Driven Methods for Online Thickness Measurement and Error Compensation in SiC CMP.

Lin J, Chen T, Ren Y, Song Z, Lyu B, Yuan J, Zhao W

DOI: 10.3390/mi17030313
Published: 2026 Feb 28
Container: Micromachines
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi17030313,
  title = {Fusion of Physical Mechanism and Data-Driven Methods for Online Thickness Measurement and Error Compensation in SiC CMP.},
  author = {Lin J and Chen T and Ren Y and Song Z and Lyu B and Yuan J and Zhao W},
  year = {2026},
  journal = {Micromachines},
  doi = {10.3390/mi17030313},
  url = {https://doi.org/10.3390/mi17030313}
}

RIS

TY  - JOUR
TI  - Fusion of Physical Mechanism and Data-Driven Methods for Online Thickness Measurement and Error Compensation in SiC CMP.
AU  - Lin J
AU  - Chen T
AU  - Ren Y
AU  - Song Z
AU  - Lyu B
AU  - Yuan J
AU  - Zhao W
PY  - 2026
JO  - Micromachines
DO  - 10.3390/mi17030313
UR  - https://doi.org/10.3390/mi17030313
ER  -

APA

J, L., T, C., Y, R., Z, S., B, L., J, Y., & W, Z. (2026). Fusion of Physical Mechanism and Data-Driven Methods for Online Thickness Measurement and Error Compensation in SiC CMP.. Micromachines. https://doi.org/10.3390/mi17030313

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pubmed · retrieved 2026-09-25T03:26:51.735Z