Linearity Improvement of MEMS Electrochemical Vibration Sensors Based on Tapered-Hole Technology

Hongmin Jiang, Honghao Zhang, Wenlang Zhao, Yulan Lu, Deyong Chen, Junbo Wang

Open source

DOI: 10.3390/mi17030333
Published: 2026-03-09
Container: Micromachines
Publisher: MDPI AG
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.3390/mi17030333,
  title = {Linearity Improvement of MEMS Electrochemical Vibration Sensors Based on Tapered-Hole Technology},
  author = {Hongmin Jiang and Honghao Zhang and Wenlang Zhao and Yulan Lu and Deyong Chen and Junbo Wang},
  year = {2026},
  journal = {Micromachines},
  doi = {10.3390/mi17030333},
  url = {https://doi.org/10.3390/mi17030333}
}

RIS

TY  - JOUR
TI  - Linearity Improvement of MEMS Electrochemical Vibration Sensors Based on Tapered-Hole Technology
AU  - Hongmin Jiang
AU  - Honghao Zhang
AU  - Wenlang Zhao
AU  - Yulan Lu
AU  - Deyong Chen
AU  - Junbo Wang
PY  - 2026
JO  - Micromachines
DO  - 10.3390/mi17030333
UR  - https://doi.org/10.3390/mi17030333
ER  -

APA

Jiang, H., Zhang, H., Zhao, W., Lu, Y., Chen, D., & Wang, J. (2026). Linearity Improvement of MEMS Electrochemical Vibration Sensors Based on Tapered-Hole Technology. Micromachines. https://doi.org/10.3390/mi17030333

Source records

crossref · retrieved 2026-09-26T15:07:35.781Z