Research on Multi-Frequency Vibration Dynamic Compensation Scheme for Electron Beam Inspection Equipment.

Jiang J, Zhang DW, Liu Z

DOI: 10.3390/mi17030336
Published: 2026 Mar 10
Container: Micromachines
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi17030336,
  title = {Research on Multi-Frequency Vibration Dynamic Compensation Scheme for Electron Beam Inspection Equipment.},
  author = {Jiang J and Zhang DW and Liu Z},
  year = {2026},
  journal = {Micromachines},
  doi = {10.3390/mi17030336},
  url = {https://doi.org/10.3390/mi17030336}
}

RIS

TY  - JOUR
TI  - Research on Multi-Frequency Vibration Dynamic Compensation Scheme for Electron Beam Inspection Equipment.
AU  - Jiang J
AU  - Zhang DW
AU  - Liu Z
PY  - 2026
JO  - Micromachines
DO  - 10.3390/mi17030336
UR  - https://doi.org/10.3390/mi17030336
ER  -

APA

J, J., DW, Z., & Z, L. (2026). Research on Multi-Frequency Vibration Dynamic Compensation Scheme for Electron Beam Inspection Equipment.. Micromachines. https://doi.org/10.3390/mi17030336

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pubmed · retrieved 2026-09-25T06:34:40.525Z