UV-LIGA Microfabrication for 1.1 THz Staggered Double-Grating Slow-Wave Structures.

Jiang Q, Li X, Hui Y, Pan P, Feng J

DOI: 10.3390/mi17040427
Published: 2026 Mar 31
Container: Micromachines
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi17040427,
  title = {UV-LIGA Microfabrication for 1.1 THz Staggered Double-Grating Slow-Wave Structures.},
  author = {Jiang Q and Li X and Hui Y and Pan P and Feng J},
  year = {2026},
  journal = {Micromachines},
  doi = {10.3390/mi17040427},
  url = {https://doi.org/10.3390/mi17040427}
}

RIS

TY  - JOUR
TI  - UV-LIGA Microfabrication for 1.1 THz Staggered Double-Grating Slow-Wave Structures.
AU  - Jiang Q
AU  - Li X
AU  - Hui Y
AU  - Pan P
AU  - Feng J
PY  - 2026
JO  - Micromachines
DO  - 10.3390/mi17040427
UR  - https://doi.org/10.3390/mi17040427
ER  -

APA

Q, J., X, L., Y, H., P, P., & J, F. (2026). UV-LIGA Microfabrication for 1.1 THz Staggered Double-Grating Slow-Wave Structures.. Micromachines. https://doi.org/10.3390/mi17040427

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pubmed · retrieved 2026-11-10T09:40:15.205Z