A Review on the Research Progress of Imprint Film Materials for Nanoimprint Lithography.

Yang Z, Ma R, Yao C, Song J, Li J, Cui G, Li H, Cao Y, Ma D

Open source

DOI: 10.3390/mi17050596
Published: 2026 May 13
Container: Micromachines
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi17050596,
  title = {A Review on the Research Progress of Imprint Film Materials for Nanoimprint Lithography.},
  author = {Yang Z and Ma R and Yao C and Song J and Li J and Cui G and Li H and Cao Y and Ma D},
  year = {2026},
  journal = {Micromachines},
  doi = {10.3390/mi17050596},
  url = {https://doi.org/10.3390/mi17050596}
}

RIS

TY  - JOUR
TI  - A Review on the Research Progress of Imprint Film Materials for Nanoimprint Lithography.
AU  - Yang Z
AU  - Ma R
AU  - Yao C
AU  - Song J
AU  - Li J
AU  - Cui G
AU  - Li H
AU  - Cao Y
AU  - Ma D
PY  - 2026
JO  - Micromachines
DO  - 10.3390/mi17050596
UR  - https://doi.org/10.3390/mi17050596
ER  -

APA

Z, Y., R, M., C, Y., J, S., J, L., G, C., H, L., Y, C., & D, M. (2026). A Review on the Research Progress of Imprint Film Materials for Nanoimprint Lithography.. Micromachines. https://doi.org/10.3390/mi17050596

Source records

pubmed · retrieved 2026-09-26T04:34:50.147Z
europe-pmc · retrieved 2026-09-26T04:34:50.158Z
doaj · retrieved 2026-09-26T04:34:50.150Z