Capacitive Sensors and Actuators by CMOS MEMS Foundry.

Yang LJ, Tasupalli C, Wang WC, Wang YJ, Muthuraman V, Lee CY

Open source

DOI: 10.3390/mi17060732
Published: 2026 Jun 17
Container: Micromachines
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi17060732,
  title = {Capacitive Sensors and Actuators by CMOS MEMS Foundry.},
  author = {Yang LJ and Tasupalli C and Wang WC and Wang YJ and Muthuraman V and Lee CY},
  year = {2026},
  journal = {Micromachines},
  doi = {10.3390/mi17060732},
  url = {https://doi.org/10.3390/mi17060732}
}

RIS

TY  - JOUR
TI  - Capacitive Sensors and Actuators by CMOS MEMS Foundry.
AU  - Yang LJ
AU  - Tasupalli C
AU  - Wang WC
AU  - Wang YJ
AU  - Muthuraman V
AU  - Lee CY
PY  - 2026
JO  - Micromachines
DO  - 10.3390/mi17060732
UR  - https://doi.org/10.3390/mi17060732
ER  -

APA

LJ, Y., C, T., WC, W., YJ, W., V, M., & CY, L. (2026). Capacitive Sensors and Actuators by CMOS MEMS Foundry.. Micromachines. https://doi.org/10.3390/mi17060732

Source records

pubmed · retrieved 2026-09-26T02:01:03.231Z
europe-pmc · retrieved 2026-09-26T02:01:03.232Z
doaj · retrieved 2026-09-26T02:01:03.265Z