Optimization of the Immersion Chemical-Mechanical Polishing Process for Gear.

Sun J, Liao L, Cai F, Guan M

DOI: 10.3390/mi17070768
Published: 2026 Jun 24
Container: Micromachines
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi17070768,
  title = {Optimization of the Immersion Chemical-Mechanical Polishing Process for Gear.},
  author = {Sun J and Liao L and Cai F and Guan M},
  year = {2026},
  journal = {Micromachines},
  doi = {10.3390/mi17070768},
  url = {https://doi.org/10.3390/mi17070768}
}

RIS

TY  - JOUR
TI  - Optimization of the Immersion Chemical-Mechanical Polishing Process for Gear.
AU  - Sun J
AU  - Liao L
AU  - Cai F
AU  - Guan M
PY  - 2026
JO  - Micromachines
DO  - 10.3390/mi17070768
UR  - https://doi.org/10.3390/mi17070768
ER  -

APA

J, S., L, L., F, C., & M, G. (2026). Optimization of the Immersion Chemical-Mechanical Polishing Process for Gear.. Micromachines. https://doi.org/10.3390/mi17070768

Source records

pubmed · retrieved 2026-09-25T18:02:32.761Z