A Review of Non-Laser and Laser Machining for Through-Glass via Fabrication.

Zhang Y, Zhang K, Xu Y, Tong W, Wang J, Ming W

DOI: 10.3390/mi17070796
Published: 2026 Jun 29
Container: Micromachines
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi17070796,
  title = {A Review of Non-Laser and Laser Machining for Through-Glass via Fabrication.},
  author = {Zhang Y and Zhang K and Xu Y and Tong W and Wang J and Ming W},
  year = {2026},
  journal = {Micromachines},
  doi = {10.3390/mi17070796},
  url = {https://doi.org/10.3390/mi17070796}
}

RIS

TY  - JOUR
TI  - A Review of Non-Laser and Laser Machining for Through-Glass via Fabrication.
AU  - Zhang Y
AU  - Zhang K
AU  - Xu Y
AU  - Tong W
AU  - Wang J
AU  - Ming W
PY  - 2026
JO  - Micromachines
DO  - 10.3390/mi17070796
UR  - https://doi.org/10.3390/mi17070796
ER  -

APA

Y, Z., K, Z., Y, X., W, T., J, W., & W, M. (2026). A Review of Non-Laser and Laser Machining for Through-Glass via Fabrication.. Micromachines. https://doi.org/10.3390/mi17070796

Source records

pubmed · retrieved 2026-11-10T07:30:27.053Z