High-Efficiency Sub-100 nm Gate GaN HEMTs Enabled by Two-Step SiNx Layer Etching Technique

Xiangxin Cao, Pengfei Wang, Minhan Mi, Xinyu Liu, Dongxu Xiao, Xiang Du, Maoteng Lu, Feiyang Chen, Zhentong Huang, Jingyun Yao, Yinyin Liang, Kehui Cui, Xiaohua Ma, Yue Hao

Open source

DOI
10.3390/mi17080889
Published
2026-07-25
Container
Micromachines
Publisher
MDPI AG
Open access
unknown

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BibTeX

@article{allodium:10.3390/mi17080889,
  title = {High-Efficiency Sub-100 nm Gate GaN HEMTs Enabled by Two-Step SiNx Layer Etching Technique},
  author = {Xiangxin Cao and Pengfei Wang and Minhan Mi and Xinyu Liu and Dongxu Xiao and Xiang Du and Maoteng Lu and Feiyang Chen and Zhentong Huang and Jingyun Yao and Yinyin Liang and Kehui Cui and Xiaohua Ma and Yue Hao},
  year = {2026},
  journal = {Micromachines},
  doi = {10.3390/mi17080889},
  url = {https://doi.org/10.3390/mi17080889}
}

RIS

TY  - JOUR
TI  - High-Efficiency Sub-100 nm Gate GaN HEMTs Enabled by Two-Step SiNx Layer Etching Technique
AU  - Xiangxin Cao
AU  - Pengfei Wang
AU  - Minhan Mi
AU  - Xinyu Liu
AU  - Dongxu Xiao
AU  - Xiang Du
AU  - Maoteng Lu
AU  - Feiyang Chen
AU  - Zhentong Huang
AU  - Jingyun Yao
AU  - Yinyin Liang
AU  - Kehui Cui
AU  - Xiaohua Ma
AU  - Yue Hao
PY  - 2026
JO  - Micromachines
DO  - 10.3390/mi17080889
UR  - https://doi.org/10.3390/mi17080889
ER  - 

APA

Cao, X., Wang, P., Mi, M., Liu, X., Xiao, D., Du, X., Lu, M., Chen, F., Huang, Z., Yao, J., Liang, Y., Cui, K., Ma, X., & Hao, Y. (2026). High-Efficiency Sub-100 nm Gate GaN HEMTs Enabled by Two-Step SiNx Layer Etching Technique. Micromachines. https://doi.org/10.3390/mi17080889

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