Sputtered Piezoelectric AlN Thin Films: Parameter Optimisation, Deposition Challenges, and Emerging Perspectives-A Review.
- DOI
- 10.3390/mi17080919
- Published
- 2026 Jul 30
- Container
- Micromachines
- Publisher
- Not recorded
- Open access
- yes
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Cite this work
BibTeX
@article{allodium:10.3390/mi17080919,
title = {Sputtered Piezoelectric AlN Thin Films: Parameter Optimisation, Deposition Challenges, and Emerging Perspectives-A Review.},
author = {Muralidaran R and Dubey P and Gour KS and Pawar S and Belwanshi V and Iannacci J},
year = {2026},
journal = {Micromachines},
doi = {10.3390/mi17080919},
url = {https://doi.org/10.3390/mi17080919}
}RIS
TY - JOUR TI - Sputtered Piezoelectric AlN Thin Films: Parameter Optimisation, Deposition Challenges, and Emerging Perspectives-A Review. AU - Muralidaran R AU - Dubey P AU - Gour KS AU - Pawar S AU - Belwanshi V AU - Iannacci J PY - 2026 JO - Micromachines DO - 10.3390/mi17080919 UR - https://doi.org/10.3390/mi17080919 ER -
APA
R, M., P, D., KS, G., S, P., V, B., & J, I. (2026). Sputtered Piezoelectric AlN Thin Films: Parameter Optimisation, Deposition Challenges, and Emerging Perspectives-A Review.. Micromachines. https://doi.org/10.3390/mi17080919