Theoretical and Numerical Investigation of Normalized Sensitivity in MEMS Capacitive Pressure Sensors Based on Dimensionless Large-Deflection Governing Equations
- DOI
- 10.3390/mi17080941
- Published
- 2026-08-07
- Container
- Micromachines
- Publisher
- MDPI AG
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.3390/mi17080941,
title = {Theoretical and Numerical Investigation of Normalized Sensitivity in MEMS Capacitive Pressure Sensors Based on Dimensionless Large-Deflection Governing Equations},
author = {Xiaoda Cao and Haiwang Li and Shizhe Song and Tiantong Xu and Yanxin Zhai},
year = {2026},
journal = {Micromachines},
doi = {10.3390/mi17080941},
url = {https://doi.org/10.3390/mi17080941}
}RIS
TY - JOUR TI - Theoretical and Numerical Investigation of Normalized Sensitivity in MEMS Capacitive Pressure Sensors Based on Dimensionless Large-Deflection Governing Equations AU - Xiaoda Cao AU - Haiwang Li AU - Shizhe Song AU - Tiantong Xu AU - Yanxin Zhai PY - 2026 JO - Micromachines DO - 10.3390/mi17080941 UR - https://doi.org/10.3390/mi17080941 ER -
APA
Cao, X., Li, H., Song, S., Xu, T., & Zhai, Y. (2026). Theoretical and Numerical Investigation of Normalized Sensitivity in MEMS Capacitive Pressure Sensors Based on Dimensionless Large-Deflection Governing Equations. Micromachines. https://doi.org/10.3390/mi17080941
Source records
- crossref · retrieved 2026-09-25T02:31:28.976Z