Selective Plasma Mode Modulation in HfO2 Charge Trap Layers via RP/DP/RP Atomic Layer Deposition for Enhanced Memory Performance and Interface Quality

Byungwook Kim, Yongwoon Jang, Hyeonwu Nam, Changyun Hong, Minkyun Kang, Wookyung Lee, Changbun Yoon

Open source

DOI
10.3390/mi17080965
Published
2026-08-15
Container
Micromachines
Publisher
MDPI AG
Open access
unknown

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BibTeX

@article{allodium:10.3390/mi17080965,
  title = {Selective Plasma Mode Modulation in HfO2 Charge Trap Layers via RP/DP/RP Atomic Layer Deposition for Enhanced Memory Performance and Interface Quality},
  author = {Byungwook Kim and Yongwoon Jang and Hyeonwu Nam and Changyun Hong and Minkyun Kang and Wookyung Lee and Changbun Yoon},
  year = {2026},
  journal = {Micromachines},
  doi = {10.3390/mi17080965},
  url = {https://doi.org/10.3390/mi17080965}
}

RIS

TY  - JOUR
TI  - Selective Plasma Mode Modulation in HfO2 Charge Trap Layers via RP/DP/RP Atomic Layer Deposition for Enhanced Memory Performance and Interface Quality
AU  - Byungwook Kim
AU  - Yongwoon Jang
AU  - Hyeonwu Nam
AU  - Changyun Hong
AU  - Minkyun Kang
AU  - Wookyung Lee
AU  - Changbun Yoon
PY  - 2026
JO  - Micromachines
DO  - 10.3390/mi17080965
UR  - https://doi.org/10.3390/mi17080965
ER  - 

APA

Kim, B., Jang, Y., Nam, H., Hong, C., Kang, M., Lee, W., & Yoon, C. (2026). Selective Plasma Mode Modulation in HfO2 Charge Trap Layers via RP/DP/RP Atomic Layer Deposition for Enhanced Memory Performance and Interface Quality. Micromachines. https://doi.org/10.3390/mi17080965

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