Development of Piezoresistive Micropressure Sensor Based on Grooved Diaphragm with Back Peninsulas and Trenches.

Chen P, Guo L, Feng J, Li C, Liu Y, Wang W

DOI: 10.3390/mi17080968
Published: 2026 Aug 16
Container: Micromachines
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi17080968,
  title = {Development of Piezoresistive Micropressure Sensor Based on Grooved Diaphragm with Back Peninsulas and Trenches.},
  author = {Chen P and Guo L and Feng J and Li C and Liu Y and Wang W},
  year = {2026},
  journal = {Micromachines},
  doi = {10.3390/mi17080968},
  url = {https://doi.org/10.3390/mi17080968}
}

RIS

TY  - JOUR
TI  - Development of Piezoresistive Micropressure Sensor Based on Grooved Diaphragm with Back Peninsulas and Trenches.
AU  - Chen P
AU  - Guo L
AU  - Feng J
AU  - Li C
AU  - Liu Y
AU  - Wang W
PY  - 2026
JO  - Micromachines
DO  - 10.3390/mi17080968
UR  - https://doi.org/10.3390/mi17080968
ER  -

APA

P, C., L, G., J, F., C, L., Y, L., & W, W. (2026). Development of Piezoresistive Micropressure Sensor Based on Grooved Diaphragm with Back Peninsulas and Trenches.. Micromachines. https://doi.org/10.3390/mi17080968

Source records

pubmed · retrieved 2026-09-26T08:51:31.634Z