Sidewall Patterning in 3D Micro/Nanosystems: A Review.
- DOI
- 10.3390/mi17090992
- Published
- 2026 Aug 22
- Container
- Micromachines
- Publisher
- Not recorded
- Open access
- yes
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Cite this work
BibTeX
@article{allodium:10.3390/mi17090992,
title = {Sidewall Patterning in 3D Micro/Nanosystems: A Review.},
author = {Liu X and Luo C},
year = {2026},
journal = {Micromachines},
doi = {10.3390/mi17090992},
url = {https://doi.org/10.3390/mi17090992}
}RIS
TY - JOUR TI - Sidewall Patterning in 3D Micro/Nanosystems: A Review. AU - Liu X AU - Luo C PY - 2026 JO - Micromachines DO - 10.3390/mi17090992 UR - https://doi.org/10.3390/mi17090992 ER -
APA
X, L., & C, L. (2026). Sidewall Patterning in 3D Micro/Nanosystems: A Review.. Micromachines. https://doi.org/10.3390/mi17090992