A High-Sensitivity MEMS Pressure Sensor with a Narrow Cross-Beam Membrane-Short Beam Structure.

Wang T, Xiao Z, Chen P, Nie M, Yan Z, Deng S, Chen J, Wang X, Liu J

DOI: 10.3390/mi17091062
Published: 2026 Sep 8
Container: Micromachines
Publisher: Not recorded
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.3390/mi17091062,
  title = {A High-Sensitivity MEMS Pressure Sensor with a Narrow Cross-Beam Membrane-Short Beam Structure.},
  author = {Wang T and Xiao Z and Chen P and Nie M and Yan Z and Deng S and Chen J and Wang X and Liu J},
  year = {2026},
  journal = {Micromachines},
  doi = {10.3390/mi17091062},
  url = {https://doi.org/10.3390/mi17091062}
}

RIS

TY  - JOUR
TI  - A High-Sensitivity MEMS Pressure Sensor with a Narrow Cross-Beam Membrane-Short Beam Structure.
AU  - Wang T
AU  - Xiao Z
AU  - Chen P
AU  - Nie M
AU  - Yan Z
AU  - Deng S
AU  - Chen J
AU  - Wang X
AU  - Liu J
PY  - 2026
JO  - Micromachines
DO  - 10.3390/mi17091062
UR  - https://doi.org/10.3390/mi17091062
ER  -

APA

T, W., Z, X., P, C., M, N., Z, Y., S, D., J, C., X, W., & J, L. (2026). A High-Sensitivity MEMS Pressure Sensor with a Narrow Cross-Beam Membrane-Short Beam Structure.. Micromachines. https://doi.org/10.3390/mi17091062

Source records

pubmed · retrieved 2026-09-26T20:46:20.222Z