Advances in Morphology Control of Through-Glass via Wet Etching for High-Performance Glass-Based Packaging.
- DOI
- 10.3390/mi17091100
- Published
- 2026 Sep 20
- Container
- Micromachines
- Publisher
- Not recorded
- Open access
- yes
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limited evidence Score 45/100 under policy 1.0.0. This is a metadata assessment, not a judgment of the paper's conclusions.
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Cite this work
BibTeX
@article{allodium:10.3390/mi17091100,
title = {Advances in Morphology Control of Through-Glass via Wet Etching for High-Performance Glass-Based Packaging.},
author = {Zhang Q and Liu H},
year = {2026},
journal = {Micromachines},
doi = {10.3390/mi17091100},
url = {https://doi.org/10.3390/mi17091100}
}RIS
TY - JOUR TI - Advances in Morphology Control of Through-Glass via Wet Etching for High-Performance Glass-Based Packaging. AU - Zhang Q AU - Liu H PY - 2026 JO - Micromachines DO - 10.3390/mi17091100 UR - https://doi.org/10.3390/mi17091100 ER -
APA
Q, Z., & H, L. (2026). Advances in Morphology Control of Through-Glass via Wet Etching for High-Performance Glass-Based Packaging.. Micromachines. https://doi.org/10.3390/mi17091100
Source records
- pubmed · retrieved 2026-11-10T07:48:30.241Z