Atomistic Insights into Oxidation Mechanisms in Chemical-Mechanical Polishing of Diamond.

Wang K, Wang Y, Li M, Li X, Wu C, Hao S, Wang N, Li C

DOI: 10.3390/mi17101107
Published: 2026 Sep 22
Container: Micromachines
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/mi17101107,
  title = {Atomistic Insights into Oxidation Mechanisms in Chemical-Mechanical Polishing of Diamond.},
  author = {Wang K and Wang Y and Li M and Li X and Wu C and Hao S and Wang N and Li C},
  year = {2026},
  journal = {Micromachines},
  doi = {10.3390/mi17101107},
  url = {https://doi.org/10.3390/mi17101107}
}

RIS

TY  - JOUR
TI  - Atomistic Insights into Oxidation Mechanisms in Chemical-Mechanical Polishing of Diamond.
AU  - Wang K
AU  - Wang Y
AU  - Li M
AU  - Li X
AU  - Wu C
AU  - Hao S
AU  - Wang N
AU  - Li C
PY  - 2026
JO  - Micromachines
DO  - 10.3390/mi17101107
UR  - https://doi.org/10.3390/mi17101107
ER  -

APA

K, W., Y, W., M, L., X, L., C, W., S, H., N, W., & C, L. (2026). Atomistic Insights into Oxidation Mechanisms in Chemical-Mechanical Polishing of Diamond.. Micromachines. https://doi.org/10.3390/mi17101107

Source records

pubmed · retrieved 2026-11-10T07:33:37.771Z