Area Scaling of Nanosecond Switching Delay in HZO Capacitors with an Ultrathin ZrO(2) Interlayer.

Hao L, Zhong Y

DOI: 10.3390/mi17101140
Published: 2026 Sep 30
Container: Micromachines
Publisher: Not recorded
Open access: yes

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BibTeX

@article{allodium:10.3390/mi17101140,
  title = {Area Scaling of Nanosecond Switching Delay in HZO Capacitors with an Ultrathin ZrO(2) Interlayer.},
  author = {Hao L and Zhong Y},
  year = {2026},
  journal = {Micromachines},
  doi = {10.3390/mi17101140},
  url = {https://doi.org/10.3390/mi17101140}
}

RIS

TY  - JOUR
TI  - Area Scaling of Nanosecond Switching Delay in HZO Capacitors with an Ultrathin ZrO(2) Interlayer.
AU  - Hao L
AU  - Zhong Y
PY  - 2026
JO  - Micromachines
DO  - 10.3390/mi17101140
UR  - https://doi.org/10.3390/mi17101140
ER  -

APA

L, H., & Y, Z. (2026). Area Scaling of Nanosecond Switching Delay in HZO Capacitors with an Ultrathin ZrO(2) Interlayer.. Micromachines. https://doi.org/10.3390/mi17101140

Source records

pubmed · retrieved 2026-11-10T09:56:28.434Z