Recovery of Over-Target RuO2-Based Thick-Film Resistors by Laser Surface Modification and Dual-Step Trimming: An 8P7R Feasibility Study Toward Multilayer Hybrid Integrated Circuits
- DOI
- 10.3390/mi17101164
- Published
- 2026-10-05
- Container
- Micromachines
- Publisher
- MDPI AG
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.3390/mi17101164,
title = {Recovery of Over-Target RuO2-Based Thick-Film Resistors by Laser Surface Modification and Dual-Step Trimming: An 8P7R Feasibility Study Toward Multilayer Hybrid Integrated Circuits},
author = {Yuan-Hwei Cheng and Jin-Siang Shaw},
year = {2026},
journal = {Micromachines},
doi = {10.3390/mi17101164},
url = {https://doi.org/10.3390/mi17101164}
}RIS
TY - JOUR TI - Recovery of Over-Target RuO2-Based Thick-Film Resistors by Laser Surface Modification and Dual-Step Trimming: An 8P7R Feasibility Study Toward Multilayer Hybrid Integrated Circuits AU - Yuan-Hwei Cheng AU - Jin-Siang Shaw PY - 2026 JO - Micromachines DO - 10.3390/mi17101164 UR - https://doi.org/10.3390/mi17101164 ER -
APA
Cheng, Y., & Shaw, J. (2026). Recovery of Over-Target RuO2-Based Thick-Film Resistors by Laser Surface Modification and Dual-Step Trimming: An 8P7R Feasibility Study Toward Multilayer Hybrid Integrated Circuits. Micromachines. https://doi.org/10.3390/mi17101164
Source records
- crossref · retrieved 2026-11-10T07:17:02.035Z