Design and Experiment of Anti-Particle-Contamination MEMS Thermal Flow Sensor by Channel Geometry Optimization and Voltage Regulation

Qilin Jiang, Jianfeng Wu, Junming Hou, Zhenxiang Yi

Open source

DOI: 10.3390/mi17101211
Published: 2026-10-21
Container: Micromachines
Publisher: MDPI AG
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.3390/mi17101211,
  title = {Design and Experiment of Anti-Particle-Contamination MEMS Thermal Flow Sensor by Channel Geometry Optimization and Voltage Regulation},
  author = {Qilin Jiang and Jianfeng Wu and Junming Hou and Zhenxiang Yi},
  year = {2026},
  journal = {Micromachines},
  doi = {10.3390/mi17101211},
  url = {https://doi.org/10.3390/mi17101211}
}

RIS

TY  - JOUR
TI  - Design and Experiment of Anti-Particle-Contamination MEMS Thermal Flow Sensor by Channel Geometry Optimization and Voltage Regulation
AU  - Qilin Jiang
AU  - Jianfeng Wu
AU  - Junming Hou
AU  - Zhenxiang Yi
PY  - 2026
JO  - Micromachines
DO  - 10.3390/mi17101211
UR  - https://doi.org/10.3390/mi17101211
ER  -

APA

Jiang, Q., Wu, J., Hou, J., & Yi, Z. (2026). Design and Experiment of Anti-Particle-Contamination MEMS Thermal Flow Sensor by Channel Geometry Optimization and Voltage Regulation. Micromachines. https://doi.org/10.3390/mi17101211

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crossref · retrieved 2026-11-04T19:00:04.611Z