Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching.

Hoshian S, Gaspar C, Vasara T, Jahangiri F, Jokinen V, Franssila S

Open source

DOI
10.3390/mi7120222
Published
2016 Dec 8
Container
Micromachines
Publisher
Not recorded
Open access
yes

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BibTeX

@article{allodium:10.3390/mi7120222,
  title = {Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching.},
  author = {Hoshian S and Gaspar C and Vasara T and Jahangiri F and Jokinen V and Franssila S},
  year = {2016},
  journal = {Micromachines},
  doi = {10.3390/mi7120222},
  url = {https://doi.org/10.3390/mi7120222}
}

RIS

TY  - JOUR
TI  - Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching.
AU  - Hoshian S
AU  - Gaspar C
AU  - Vasara T
AU  - Jahangiri F
AU  - Jokinen V
AU  - Franssila S
PY  - 2016
JO  - Micromachines
DO  - 10.3390/mi7120222
UR  - https://doi.org/10.3390/mi7120222
ER  -

APA

S, H., C, G., T, V., F, J., V, J., & S, F. (2016). Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching.. Micromachines. https://doi.org/10.3390/mi7120222

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