Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography.

Vakarin V, Melati D, Dinh TTD, Le Roux X, Kan WKK, Dupré C, Szelag B, Monfray S, Boeuf F, Cheben P, Cassan E, Marris-Morini D, Vivien L, Alonso-Ramos CA

Open source

DOI: 10.3390/nano11112949
Published: 2021 Nov 3
Container: Nanomaterials (Basel, Switzerland)
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/nano11112949,
  title = {Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography.},
  author = {Vakarin V and Melati D and Dinh TTD and Le Roux X and Kan WKK and Dupré C and Szelag B and Monfray S and Boeuf F and Cheben P and Cassan E and Marris-Morini D and Vivien L and Alonso-Ramos CA},
  year = {2021},
  journal = {Nanomaterials (Basel, Switzerland)},
  doi = {10.3390/nano11112949},
  url = {https://doi.org/10.3390/nano11112949}
}

RIS

TY  - JOUR
TI  - Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography.
AU  - Vakarin V
AU  - Melati D
AU  - Dinh TTD
AU  - Le Roux X
AU  - Kan WKK
AU  - Dupré C
AU  - Szelag B
AU  - Monfray S
AU  - Boeuf F
AU  - Cheben P
AU  - Cassan E
AU  - Marris-Morini D
AU  - Vivien L
AU  - Alonso-Ramos CA
PY  - 2021
JO  - Nanomaterials (Basel, Switzerland)
DO  - 10.3390/nano11112949
UR  - https://doi.org/10.3390/nano11112949
ER  -

APA

V, V., D, M., TTD, D., X, L. R., WKK, K., C, D., B, S., S, M., F, B., P, C., E, C., D, M., L, V., & CA, A. (2021). Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography.. Nanomaterials (Basel, Switzerland). https://doi.org/10.3390/nano11112949

Source records

pubmed · retrieved 2026-09-25T01:56:27.611Z