Tailoring the Hybrid Magnetron Sputtering Process (HiPIMS and dcMS) to Manufacture Ceramic Multilayers: Powering Conditions, Target Materials, and Base Layers
- DOI
- 10.3390/nano12142465
- Published
- 2022-07-18
- Container
- Nanomaterials
- Publisher
- MDPI AG
- Open access
- unknown
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Cite this work
BibTeX
@article{allodium:10.3390/nano12142465,
title = {Tailoring the Hybrid Magnetron Sputtering Process (HiPIMS and dcMS) to Manufacture Ceramic Multilayers: Powering Conditions, Target Materials, and Base Layers},
author = {Bruno César Noronha Marques de Castilho and Felipe de Sousa Mazuco and Alisson Mendes Rodrigues and Pedro Renato Tavares Avila and Raira Chefer Apolinario and Philipp Daum and Fabiana Pereira da Costa and Romualdo Rodrigues Menezes and Gelmires de Araújo Neves and Christian Greiner and Haroldo Cavalcanti Pinto},
year = {2022},
journal = {Nanomaterials},
doi = {10.3390/nano12142465},
url = {https://doi.org/10.3390/nano12142465}
}RIS
TY - JOUR TI - Tailoring the Hybrid Magnetron Sputtering Process (HiPIMS and dcMS) to Manufacture Ceramic Multilayers: Powering Conditions, Target Materials, and Base Layers AU - Bruno César Noronha Marques de Castilho AU - Felipe de Sousa Mazuco AU - Alisson Mendes Rodrigues AU - Pedro Renato Tavares Avila AU - Raira Chefer Apolinario AU - Philipp Daum AU - Fabiana Pereira da Costa AU - Romualdo Rodrigues Menezes AU - Gelmires de Araújo Neves AU - Christian Greiner AU - Haroldo Cavalcanti Pinto PY - 2022 JO - Nanomaterials DO - 10.3390/nano12142465 UR - https://doi.org/10.3390/nano12142465 ER -
APA
Castilho, B. C. N. M. D., Mazuco, F. D. S., Rodrigues, A. M., Avila, P. R. T., Apolinario, R. C., Daum, P., Costa, F. P. D., Menezes, R. R., Neves, G. D. A., Greiner, C., & Pinto, H. C. (2022). Tailoring the Hybrid Magnetron Sputtering Process (HiPIMS and dcMS) to Manufacture Ceramic Multilayers: Powering Conditions, Target Materials, and Base Layers. Nanomaterials. https://doi.org/10.3390/nano12142465
Source records
- crossref · retrieved 2026-09-25T22:41:04.353Z