Evolution in Lithography Techniques: Microlithography to Nanolithography.

Sharma E, Rathi R, Misharwal J, Sinhmar B, Kumari S, Dalal J, Kumar A

Open source

DOI: 10.3390/nano12162754
Published: 2022 Aug 11
Container: Nanomaterials (Basel, Switzerland)
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/nano12162754,
  title = {Evolution in Lithography Techniques: Microlithography to Nanolithography.},
  author = {Sharma E and Rathi R and Misharwal J and Sinhmar B and Kumari S and Dalal J and Kumar A},
  year = {2022},
  journal = {Nanomaterials (Basel, Switzerland)},
  doi = {10.3390/nano12162754},
  url = {https://doi.org/10.3390/nano12162754}
}

RIS

TY  - JOUR
TI  - Evolution in Lithography Techniques: Microlithography to Nanolithography.
AU  - Sharma E
AU  - Rathi R
AU  - Misharwal J
AU  - Sinhmar B
AU  - Kumari S
AU  - Dalal J
AU  - Kumar A
PY  - 2022
JO  - Nanomaterials (Basel, Switzerland)
DO  - 10.3390/nano12162754
UR  - https://doi.org/10.3390/nano12162754
ER  -

APA

E, S., R, R., J, M., B, S., S, K., J, D., & A, K. (2022). Evolution in Lithography Techniques: Microlithography to Nanolithography.. Nanomaterials (Basel, Switzerland). https://doi.org/10.3390/nano12162754

Source records

pubmed · retrieved 2026-09-26T09:38:57.895Z
europe-pmc · retrieved 2026-09-26T09:38:57.913Z
doaj · retrieved 2026-09-26T09:38:57.889Z