Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiNx/La:HfO2/TiNx Stacks Grown by PEALD on SiO2/Si

Elena I. Suvorova, Oleg V. Uvarov, Kirill V. Chizh, Alexey A. Klimenko, Philippe A. Buffat

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DOI: 10.3390/nano12203608
Published: 2022-10-14
Container: Nanomaterials
Publisher: MDPI AG
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.3390/nano12203608,
  title = {Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiNx/La:HfO2/TiNx Stacks Grown by PEALD on SiO2/Si},
  author = {Elena I. Suvorova and Oleg V. Uvarov and Kirill V. Chizh and Alexey A. Klimenko and Philippe A. Buffat},
  year = {2022},
  journal = {Nanomaterials},
  doi = {10.3390/nano12203608},
  url = {https://doi.org/10.3390/nano12203608}
}

RIS

TY  - JOUR
TI  - Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiNx/La:HfO2/TiNx Stacks Grown by PEALD on SiO2/Si
AU  - Elena I. Suvorova
AU  - Oleg V. Uvarov
AU  - Kirill V. Chizh
AU  - Alexey A. Klimenko
AU  - Philippe A. Buffat
PY  - 2022
JO  - Nanomaterials
DO  - 10.3390/nano12203608
UR  - https://doi.org/10.3390/nano12203608
ER  -

APA

Suvorova, E. I., Uvarov, O. V., Chizh, K. V., Klimenko, A. A., & Buffat, P. A. (2022). Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiNx/La:HfO2/TiNx Stacks Grown by PEALD on SiO2/Si. Nanomaterials. https://doi.org/10.3390/nano12203608

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crossref · retrieved 2026-09-25T04:56:36.034Z