CMOS Scaling for the 5 nm Node and Beyond: Device, Process and Technology.

Radamson HH, Miao Y, Zhou Z, Wu Z, Kong Z, Gao J, Yang H, Ren Y, Zhang Y, Shi J, Xiang J, Cui H, Lu B, Li J, Liu J, Lin H, Xu H, Li M, Cao J, He C, Duan X, Zhao X, Su J, Du Y, Yu J, Wu Y, Jiang M, Liang D, Li B, Dong Y, Wang G

Open source

DOI: 10.3390/nano14100837
Published: 2024 May 9
Container: Nanomaterials (Basel, Switzerland)
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/nano14100837,
  title = {CMOS Scaling for the 5 nm Node and Beyond: Device, Process and Technology.},
  author = {Radamson HH and Miao Y and Zhou Z and Wu Z and Kong Z and Gao J and Yang H and Ren Y and Zhang Y and Shi J and Xiang J and Cui H and Lu B and Li J and Liu J and Lin H and Xu H and Li M and Cao J and He C and Duan X and Zhao X and Su J and Du Y and Yu J and Wu Y and Jiang M and Liang D and Li B and Dong Y and Wang G},
  year = {2024},
  journal = {Nanomaterials (Basel, Switzerland)},
  doi = {10.3390/nano14100837},
  url = {https://doi.org/10.3390/nano14100837}
}

RIS

TY  - JOUR
TI  - CMOS Scaling for the 5 nm Node and Beyond: Device, Process and Technology.
AU  - Radamson HH
AU  - Miao Y
AU  - Zhou Z
AU  - Wu Z
AU  - Kong Z
AU  - Gao J
AU  - Yang H
AU  - Ren Y
AU  - Zhang Y
AU  - Shi J
AU  - Xiang J
AU  - Cui H
AU  - Lu B
AU  - Li J
AU  - Liu J
AU  - Lin H
AU  - Xu H
AU  - Li M
AU  - Cao J
AU  - He C
AU  - Duan X
AU  - Zhao X
AU  - Su J
AU  - Du Y
AU  - Yu J
AU  - Wu Y
AU  - Jiang M
AU  - Liang D
AU  - Li B
AU  - Dong Y
AU  - Wang G
PY  - 2024
JO  - Nanomaterials (Basel, Switzerland)
DO  - 10.3390/nano14100837
UR  - https://doi.org/10.3390/nano14100837
ER  -

APA

HH, R., Y, M., Z, Z., Z, W., Z, K., J, G., H, Y., Y, R., Y, Z., J, S., J, X., H, C., B, L., J, L., J, L., H, L., H, X., M, L., J, C., C, H., X, D., X, Z., J, S., Y, D., J, Y., Y, W., M, J., D, L., B, L., Y, D., & G, W. (2024). CMOS Scaling for the 5 nm Node and Beyond: Device, Process and Technology.. Nanomaterials (Basel, Switzerland). https://doi.org/10.3390/nano14100837

Source records

pubmed · retrieved 2026-09-25T17:54:20.536Z