PWDD-Net: A Patterned Wafer Defect Detection Network for Semiconductor Manufacturing.

Kong W, Zhang W, Qin L, Gong D

Open source

DOI
10.3390/nano16161026
Published
2026 Aug 19
Container
Nanomaterials (Basel, Switzerland)
Publisher
Not recorded
Open access
yes

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BibTeX

@article{allodium:10.3390/nano16161026,
  title = {PWDD-Net: A Patterned Wafer Defect Detection Network for Semiconductor Manufacturing.},
  author = {Kong W and Zhang W and Qin L and Gong D},
  year = {2026},
  journal = {Nanomaterials (Basel, Switzerland)},
  doi = {10.3390/nano16161026},
  url = {https://doi.org/10.3390/nano16161026}
}

RIS

TY  - JOUR
TI  - PWDD-Net: A Patterned Wafer Defect Detection Network for Semiconductor Manufacturing.
AU  - Kong W
AU  - Zhang W
AU  - Qin L
AU  - Gong D
PY  - 2026
JO  - Nanomaterials (Basel, Switzerland)
DO  - 10.3390/nano16161026
UR  - https://doi.org/10.3390/nano16161026
ER  - 

APA

W, K., W, Z., L, Q., & D, G. (2026). PWDD-Net: A Patterned Wafer Defect Detection Network for Semiconductor Manufacturing.. Nanomaterials (Basel, Switzerland). https://doi.org/10.3390/nano16161026

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