Hybrid Laser–Etching Fabrication of High-Density Antireflective Microstructures on DLC-Coated Silicon Using Burst-Mode Bessel Beam Processing
- DOI
- 10.3390/nano16181131
- Published
- 09
- Container
- Nanomaterials
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- Not recorded
- Open access
- yes
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BibTeX
@article{allodium:10.3390/nano16181131,
title = {Hybrid Laser–Etching Fabrication of High-Density Antireflective Microstructures on DLC-Coated Silicon Using Burst-Mode Bessel Beam Processing},
author = {Xxx Sedao and Javier Prada-Rodrigo and Agathe Cavanna and Ionut-Alexandru Bunea and Antoine Gonon and William Ravisy and Yannick Bleu and Christian Seassal and Yves Jourlin and Laurent Dubost and Nicolas Crespo-Monteiro and Razvan Stoian and Yoan Di Maio and Claire Deeb and Isabelle Verrier and Emilie Gamet},
year = {2026},
journal = {Nanomaterials},
doi = {10.3390/nano16181131},
url = {https://doi.org/10.3390/nano16181131}
}RIS
TY - JOUR TI - Hybrid Laser–Etching Fabrication of High-Density Antireflective Microstructures on DLC-Coated Silicon Using Burst-Mode Bessel Beam Processing AU - Xxx Sedao AU - Javier Prada-Rodrigo AU - Agathe Cavanna AU - Ionut-Alexandru Bunea AU - Antoine Gonon AU - William Ravisy AU - Yannick Bleu AU - Christian Seassal AU - Yves Jourlin AU - Laurent Dubost AU - Nicolas Crespo-Monteiro AU - Razvan Stoian AU - Yoan Di Maio AU - Claire Deeb AU - Isabelle Verrier AU - Emilie Gamet PY - 2026 JO - Nanomaterials DO - 10.3390/nano16181131 UR - https://doi.org/10.3390/nano16181131 ER -
APA
Sedao, X., Prada-Rodrigo, J., Cavanna, A., Bunea, I., Gonon, A., Ravisy, W., Bleu, Y., Seassal, C., Jourlin, Y., Dubost, L., Crespo-Monteiro, N., Stoian, R., Maio, Y. D., Deeb, C., Verrier, I., & Gamet, E. (2026). Hybrid Laser–Etching Fabrication of High-Density Antireflective Microstructures on DLC-Coated Silicon Using Burst-Mode Bessel Beam Processing. Nanomaterials. https://doi.org/10.3390/nano16181131