ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition

Alireza M. Kia, Nora Haufe, Sajjad Esmaeili, Clemens Mart, Mikko Utriainen, Riikka L. Puurunen, Wenke Weinreich

Open source

DOI
10.3390/nano9071035
Published
2019-07-19
Container
Nanomaterials
Publisher
MDPI AG
Open access
unknown

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BibTeX

@article{allodium:10.3390/nano9071035,
  title = {ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition},
  author = {Alireza M. Kia and Nora Haufe and Sajjad Esmaeili and Clemens Mart and Mikko Utriainen and Riikka L. Puurunen and Wenke Weinreich},
  year = {2019},
  journal = {Nanomaterials},
  doi = {10.3390/nano9071035},
  url = {https://doi.org/10.3390/nano9071035}
}

RIS

TY  - JOUR
TI  - ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition
AU  - Alireza M. Kia
AU  - Nora Haufe
AU  - Sajjad Esmaeili
AU  - Clemens Mart
AU  - Mikko Utriainen
AU  - Riikka L. Puurunen
AU  - Wenke Weinreich
PY  - 2019
JO  - Nanomaterials
DO  - 10.3390/nano9071035
UR  - https://doi.org/10.3390/nano9071035
ER  - 

APA

Kia, A. M., Haufe, N., Esmaeili, S., Mart, C., Utriainen, M., Puurunen, R. L., & Weinreich, W. (2019). ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition. Nanomaterials. https://doi.org/10.3390/nano9071035

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