Nanoindentation Analysis of SU-8 Coated Wafers at Different Baking Phases

Tamás Tarjányi, Gábor Gulyás, Krisztián Bali, Márton Sámi, Rebeka Anna Kiss, Barbara Beiler, Péter Fürjes, Tibor Szabó

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DOI: 10.3390/polym17243337
Published: 2025-12-18
Container: Polymers
Publisher: MDPI AG
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.3390/polym17243337,
  title = {Nanoindentation Analysis of SU-8 Coated Wafers at Different Baking Phases},
  author = {Tamás Tarjányi and Gábor Gulyás and Krisztián Bali and Márton Sámi and Rebeka Anna Kiss and Barbara Beiler and Péter Fürjes and Tibor Szabó},
  year = {2025},
  journal = {Polymers},
  doi = {10.3390/polym17243337},
  url = {https://doi.org/10.3390/polym17243337}
}

RIS

TY  - JOUR
TI  - Nanoindentation Analysis of SU-8 Coated Wafers at Different Baking Phases
AU  - Tamás Tarjányi
AU  - Gábor Gulyás
AU  - Krisztián Bali
AU  - Márton Sámi
AU  - Rebeka Anna Kiss
AU  - Barbara Beiler
AU  - Péter Fürjes
AU  - Tibor Szabó
PY  - 2025
JO  - Polymers
DO  - 10.3390/polym17243337
UR  - https://doi.org/10.3390/polym17243337
ER  -

APA

Tarjányi, T., Gulyás, G., Bali, K., Sámi, M., Kiss, R. A., Beiler, B., Fürjes, P., & Szabó, T. (2025). Nanoindentation Analysis of SU-8 Coated Wafers at Different Baking Phases. Polymers. https://doi.org/10.3390/polym17243337

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crossref · retrieved 2026-09-26T00:25:58.103Z