Nanoscale Roughness in Ultra-Thick Resists by Laser-Scanning Grayscale Direct-Write Lithography and Surface Smoothing.

Malvicini G, Güçtemur D, Saxer S, Erjawetz J, Schift H

DOI: 10.3390/polym18172148
Published: 2026 Sep 2
Container: Polymers
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/polym18172148,
  title = {Nanoscale Roughness in Ultra-Thick Resists by Laser-Scanning Grayscale Direct-Write Lithography and Surface Smoothing.},
  author = {Malvicini G and Güçtemur D and Saxer S and Erjawetz J and Schift H},
  year = {2026},
  journal = {Polymers},
  doi = {10.3390/polym18172148},
  url = {https://doi.org/10.3390/polym18172148}
}

RIS

TY  - JOUR
TI  - Nanoscale Roughness in Ultra-Thick Resists by Laser-Scanning Grayscale Direct-Write Lithography and Surface Smoothing.
AU  - Malvicini G
AU  - Güçtemur D
AU  - Saxer S
AU  - Erjawetz J
AU  - Schift H
PY  - 2026
JO  - Polymers
DO  - 10.3390/polym18172148
UR  - https://doi.org/10.3390/polym18172148
ER  -

APA

G, M., D, G., S, S., J, E., & H, S. (2026). Nanoscale Roughness in Ultra-Thick Resists by Laser-Scanning Grayscale Direct-Write Lithography and Surface Smoothing.. Polymers. https://doi.org/10.3390/polym18172148

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pubmed · retrieved 2026-09-25T03:40:48.192Z