Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm.
- DOI
- 10.3390/s19061410
- Published
- 2019 Mar 22
- Container
- Sensors (Basel, Switzerland)
- Publisher
- Not recorded
- Open access
- yes
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BibTeX
@article{allodium:10.3390/s19061410,
title = {Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm.},
author = {Brand U and Xu M and Doering L and Langfahl-Klabes J and Behle H and Bütefisch S and Ahbe T and Peiner E and Völlmeke S and Frank T and Mickan B and Kiselev I and Hauptmannl M and Drexel M},
year = {2019},
journal = {Sensors (Basel, Switzerland)},
doi = {10.3390/s19061410},
url = {https://doi.org/10.3390/s19061410}
}RIS
TY - JOUR TI - Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm. AU - Brand U AU - Xu M AU - Doering L AU - Langfahl-Klabes J AU - Behle H AU - Bütefisch S AU - Ahbe T AU - Peiner E AU - Völlmeke S AU - Frank T AU - Mickan B AU - Kiselev I AU - Hauptmannl M AU - Drexel M PY - 2019 JO - Sensors (Basel, Switzerland) DO - 10.3390/s19061410 UR - https://doi.org/10.3390/s19061410 ER -
APA
U, B., M, X., L, D., J, L., H, B., S, B., T, A., E, P., S, V., T, F., B, M., I, K., M, H., & M, D. (2019). Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm.. Sensors (Basel, Switzerland). https://doi.org/10.3390/s19061410
Source records
- pubmed · retrieved 2026-09-27T10:57:04.374Z