Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm.

Brand U, Xu M, Doering L, Langfahl-Klabes J, Behle H, Bütefisch S, Ahbe T, Peiner E, Völlmeke S, Frank T, Mickan B, Kiselev I, Hauptmannl M, Drexel M

Open source

DOI
10.3390/s19061410
Published
2019 Mar 22
Container
Sensors (Basel, Switzerland)
Publisher
Not recorded
Open access
yes

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BibTeX

@article{allodium:10.3390/s19061410,
  title = {Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm.},
  author = {Brand U and Xu M and Doering L and Langfahl-Klabes J and Behle H and Bütefisch S and Ahbe T and Peiner E and Völlmeke S and Frank T and Mickan B and Kiselev I and Hauptmannl M and Drexel M},
  year = {2019},
  journal = {Sensors (Basel, Switzerland)},
  doi = {10.3390/s19061410},
  url = {https://doi.org/10.3390/s19061410}
}

RIS

TY  - JOUR
TI  - Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm.
AU  - Brand U
AU  - Xu M
AU  - Doering L
AU  - Langfahl-Klabes J
AU  - Behle H
AU  - Bütefisch S
AU  - Ahbe T
AU  - Peiner E
AU  - Völlmeke S
AU  - Frank T
AU  - Mickan B
AU  - Kiselev I
AU  - Hauptmannl M
AU  - Drexel M
PY  - 2019
JO  - Sensors (Basel, Switzerland)
DO  - 10.3390/s19061410
UR  - https://doi.org/10.3390/s19061410
ER  - 

APA

U, B., M, X., L, D., J, L., H, B., S, B., T, A., E, P., S, V., T, F., B, M., I, K., M, H., & M, D. (2019). Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm.. Sensors (Basel, Switzerland). https://doi.org/10.3390/s19061410

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