Epitaxial Growth of Sc(0.09)Al(0.91)N and Sc(0.18)Al(0.82)N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications.
- DOI
- 10.3390/s20164630
- Published
- 2020 Aug 17
- Container
- Sensors (Basel, Switzerland)
- Publisher
- Not recorded
- Open access
- yes
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BibTeX
@article{allodium:10.3390/s20164630,
title = {Epitaxial Growth of Sc(0.09)Al(0.91)N and Sc(0.18)Al(0.82)N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications.},
author = {Bartoli F and Streque J and Ghanbaja J and Pigeat P and Boulet P and Hage-Ali S and Naumenko N and Redjaïmia A and Aubert T and Elmazria O},
year = {2020},
journal = {Sensors (Basel, Switzerland)},
doi = {10.3390/s20164630},
url = {https://doi.org/10.3390/s20164630}
}RIS
TY - JOUR TI - Epitaxial Growth of Sc(0.09)Al(0.91)N and Sc(0.18)Al(0.82)N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications. AU - Bartoli F AU - Streque J AU - Ghanbaja J AU - Pigeat P AU - Boulet P AU - Hage-Ali S AU - Naumenko N AU - Redjaïmia A AU - Aubert T AU - Elmazria O PY - 2020 JO - Sensors (Basel, Switzerland) DO - 10.3390/s20164630 UR - https://doi.org/10.3390/s20164630 ER -
APA
F, B., J, S., J, G., P, P., P, B., S, H., N, N., A, R., T, A., & O, E. (2020). Epitaxial Growth of Sc(0.09)Al(0.91)N and Sc(0.18)Al(0.82)N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications.. Sensors (Basel, Switzerland). https://doi.org/10.3390/s20164630
Source records
- pubmed · retrieved 2026-09-27T15:49:53.167Z