A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology

Chi-Feng Chen, Chih-Hsiung Shen, Yun-Ying Yeh

Open source

DOI: 10.3390/s21010180
Published: 2020-12-29
Container: Sensors
Publisher: MDPI AG
Open access: unknown

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Cite this work

BibTeX

@article{allodium:10.3390/s21010180,
  title = {A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology},
  author = {Chi-Feng Chen and Chih-Hsiung Shen and Yun-Ying Yeh},
  year = {2020},
  journal = {Sensors},
  doi = {10.3390/s21010180},
  url = {https://doi.org/10.3390/s21010180}
}

RIS

TY  - JOUR
TI  - A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology
AU  - Chi-Feng Chen
AU  - Chih-Hsiung Shen
AU  - Yun-Ying Yeh
PY  - 2020
JO  - Sensors
DO  - 10.3390/s21010180
UR  - https://doi.org/10.3390/s21010180
ER  -

APA

Chen, C., Shen, C., & Yeh, Y. (2020). A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology. Sensors. https://doi.org/10.3390/s21010180

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crossref · retrieved 2026-11-04T18:20:38.539Z