Development of a Flexible Integrated Self-Calibrating MEMS Pressure Sensor Using a Liquid-to-Vapor Phase Change.

Kang Y, Mouring S, de Clerck A, Mao S, Ng W, Ruan H

DOI: 10.3390/s22249737
Published: 2022 Dec 12
Container: Sensors (Basel, Switzerland)
Publisher: Not recorded
Open access: yes

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Cite this work

BibTeX

@article{allodium:10.3390/s22249737,
  title = {Development of a Flexible Integrated Self-Calibrating MEMS Pressure Sensor Using a Liquid-to-Vapor Phase Change.},
  author = {Kang Y and Mouring S and de Clerck A and Mao S and Ng W and Ruan H},
  year = {2022},
  journal = {Sensors (Basel, Switzerland)},
  doi = {10.3390/s22249737},
  url = {https://doi.org/10.3390/s22249737}
}

RIS

TY  - JOUR
TI  - Development of a Flexible Integrated Self-Calibrating MEMS Pressure Sensor Using a Liquid-to-Vapor Phase Change.
AU  - Kang Y
AU  - Mouring S
AU  - de Clerck A
AU  - Mao S
AU  - Ng W
AU  - Ruan H
PY  - 2022
JO  - Sensors (Basel, Switzerland)
DO  - 10.3390/s22249737
UR  - https://doi.org/10.3390/s22249737
ER  -

APA

Y, K., S, M., A, D. C., S, M., W, N., & H, R. (2022). Development of a Flexible Integrated Self-Calibrating MEMS Pressure Sensor Using a Liquid-to-Vapor Phase Change.. Sensors (Basel, Switzerland). https://doi.org/10.3390/s22249737

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pubmed · retrieved 2026-09-26T17:33:49.284Z